Features & Benefits
- Flow Range: Up to 2000 SCCM
- Linearity Error: 0.5 – 1.0% FS
- Repeatability: ± 0.15% FS
- Response Time: 40 msec
View CAD
View MicroFlow and MediFlow Datasheets (with ordering matrices)
Specifications Snapshot
** Scroll down for detailed specifications**
| Economical Model | Standard Model | |
| Linearity | 1.0 – 3.0% of Full Scale (Typical) | ± 0.5 – 1.0% of Full Scale |
| Repeatability & Hysteresis | Range Dependant | ± 0.15% FS |
| Response Time (to within 1% of set point) |
40 msec | 40 msec |
| Temperature Coefficient (from 21ºC set point) |
0.09% / ºC | 0.09% / °C |
| DETAILED PRODUCT SPECIFICATIONS | |
|---|---|
| Performance | |
| Linearity | ± 0.5 - 1.0% of Full Scale (Typical) |
| Repeatability & Hysteresis | ± 0.15% FS |
| Temperature Coefficient | 0.09% / ºC from 21ºC set point |
| Response Time | 40 msec (Typical, from 2%-100 FS) |
| Fluid Requirements: | |
| Calibration Gas | Any, Non-Corrosive, Customer Specified |
| Flow Range | Flow Range: Up to 2000 SCCM (He/H2) and 1000 SCCM (other gases) |
| Pressure Range | 0-100 psi, Cal Pressure: 25 psi |
| Internal Leakage | 10-5 @ 1, 30 and 100 psi (He) |
| External Leakage | 2 x 10-6 sccm (He) |
| Electrical Requirements: | |
| Input Voltage (single supply) | 12V (+10% - 3%), 15V (+/- 10%), 24V (+/-10%) |
| Power Consumption | 3.0 Watts Maximum |
| Control & Output Voltage/Signal | 0-5 VDC, 0-10VDC, 1-5 VDC, 4-20mA, RS232 (Addressable) |
| Environmental Requirements: | |
| Operating Ambient Temp. | 0-50ºC |
| Storage Temperature | -40 to 70ºC |
| Humidity Range | 5% - 95% (Relative, non-condensing) |
| Nominal Temperature | 21ºC ± 5ºC |
| Mechanical Configuration: | |
| Input/Output Ports | 10-32 Threaded (Others, Consult Factory) |
| Dimensions | L: 2.0” W: 1.5” H: 1.85” |
| Weight | 5.4 oz |
| Construction (wetted materials): | |
| Manifold | Nickel Plated Aluminum |
| O-Rings | Fluorocarbon (Viton®), others at additional cost |
| Valve Components | Brass 360, AISI 300 series, 430 FR Stainless Steel |
| Flow Sensor | Ceramic Flow Tube (non-out gassing), Silicon, Silicon Nitrite Gold, Aluminum Oxide Epoxy Sealant, Fluorocarbon (Viton®), Polythermide (100, 200 & 300 sccm MFC only) |
